Microcluster Large Substrates

    The Obducat Microcluster large substrates systems are fully automatic stand-alone spin coater (for open bowl or RCCT), spray coater, developer, wet process spinner, and hot- / cool- & HMDS plates for large area substrates up to GEN 5 (51” x 51”). The systems can be configured for manual loading or full automatic robotic handling.

    More about the product

    Easy access to the modules for maintenance, cleaning and service

    Clear and easy to operate user interface with 21“ color flat touch screen

    Substrate sizes up to Ø 1.800 mm; 1.300 mm x 1.300 mm (51” x 51”)

    Ability to handle a wide range of panel sizes without machine changes or with simple modifications

    System prepared for heavy substrates

    Options for semi- and fully automatic loading

    For substrate 0,5 mm up to 20 mm thick

    For plastic electronic foil

    Downloads

    Microcluster Datasheet

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