Quickstep W 300 SM

More about the product

Wafer sizes: from small pieces, up to Ø 12” (300 mm) or 9” x 9” (230 mm x 230 mm)

Unlimited number of recipes

Programmable parameters:

  • Chuck speed
  • Arm sweep
  • Media
  • High pressure
  • Brush rotation and pressure
  • Application time

Adjustable parameters:

  • Media flow
  • Megasonic energy