Obducat is the world-leading supplier of lithography solutions enabling advanced micro- and nano- patterning of surfaces.

Obducat provides viable and cost-effective lithography and wet processing solutions that will give a competitive edge to our customers, enabling them to deliver break-through applications and achieve improved profitability and success.

Obducat's products can be divided into two groups based on the underlying technology platform;
Nanoimprint Lithography (NIL) and the Wet Processing systems.

Nano Imprint Lithography

Being the first company to commercialize Nano Imprint Lithography (NIL), Obducat is today the market leader and has the largest installed base worldwide of NIL.

SINDRE® - for industrial production

The SINDRE® 400 / 600 / 800 Nano Imprint Lithography (NIL) systems are designed for fully automated high volume production, using Obducat's proprietary IPS®/STU® process. 

Cost efficiency and contamination control is obtained through hands-off operation and a sophisticated cassette-to-cassette handling procedure. The high throughput and yield enables an unsurpassed efficient cost of ownership. The standard configuration of the systems generates a throughput of 60 wafers per hour. The SINDRE® platform has a high degree of flexibility and there are big possibilities for adaption to customer-specific demands.

EITRE® - for Research & Development

The EITRE® Nano Imprint Lithography (NIL) series offer a flexible and cost efficient lithography solution. The systems are suitable for Research & Development purposes allowing replication of patterns in the micro- and nanometer range.

EITRE® offers a complete range of imprint methods, including thermal NIL, hot embossing, UV NIL, as well as Obducat's proprietary Simultanous Thermal and UV (STU®) imprint process.

All Nano Imprint Lithography (NIL) systems from Obducat are equipped with full area thermal imprint, using the patented SoftPress® technology. The proprietary design of the heater, embedded in the substrate chuck, provides a homogeneous temperature distribution across the whole imprint area. The uniform heating and a wide range of temperature settings, makes it possible to use a wide range of imprint polymer.

Read more about Obducat proprietary technologies:

The wet processing systems are based on standardized platforms, which allows a wide range of individual configurations for processing and handling of fragile substrates used in the semiconductor-, MEMS, piezoMEMS, OLED display and similar industries as well as in R&D.

The product portfolio for wet processing equipment encompass spin or spray coating, baking, priming, developing, etching, substrate / post CMP cleaning, lift-off and stripping of various substrate sizes and materials. Additionally, the possibility of coating wafers on both sides can be offered as well which includes the possibility for 100% edge handling capability.