Quickstep CH 200 SM RCCT

More about the product

Wafer size up to Ø 12“ (Ø 300 mm) or substrate size up to 9“ x 9“ (230 mm x 230 mm)

Simple change over from Ø 2“ - 12” wafers and up to 9” x 9” substrates

Programmable spin speed up to 3.000 rpm (direct drive brushless motor)

Easy to clean multi part process chamber made of ‘High Purity’ material

Operation control unit with color touch display and Windows like surface

Fully programmable process parameters

Unlimited numbers of recipes (easily expandable by USB-stick)

Unlimited programmable recipe steps

USB and Ethernet interface for easy data storage and recipe transfer

Start, stop and vacuum on/off functions directly at the process module

Vacuum sensor for safety interlock and a visible vacuum gauge

Transparent cover lid with safety interrupt sensor

CE marked

Bench mounted or stand-alone configurations available