The standard MCT Large Substrates configuration is equipped with an I/O station and an multi axis robot system on a linear track. It can incorporate up to 10 modules configured for Coating, Developing and/or Thermal processing.
Coating is performed using the standard open process bowl and a standard vacuum chuck. This ensures a uniform and repeatable coating process. As an option the open bowl module can be replaced with our Rotating Covered Chuck Technology (RCCT™) module. (See tool options)
The developer can perform both puddle and spray-based processes.
The Thermal processing units can be equipped with up to 8 temperature plates in a stacker – hot plates, cool plates & HMDS vapor prime hot plate. The hot plates have a programmable temperature range up to 300°C and are equipped with programmable proximity pins.
The HMDS vapor prime hot plate has a programmable temperature range up to 200°C. The process is fully automated and adheres to all recognized safety standards.