The QS Large Substrate platform is highly configurable enabling a fit to almost any customer requirements while offering a superior cost efficiency. The various modules for Coating, Developing and Thermal processing can be combined as needed and each module have a wide variety of options to enable a perfect fit to your processing needs.
The tools are available as stand-alone tools which can be placed next to each other to create a line of processing units.
Coating is performed using the standard open bowl and standard vacuum chuck. This ensures a uniform and repeatable coating process. As an option the open bowl module can be replaced with our Rotating Covered Chuck Technology (RCCT™) module (See tool options).
The developer can perform both puddle and spray-based processes. The Thermal processing units can be equipped with hot plate, cool plate or HMDS vapor prime hot plate. The hot plate has a programmable temperature range up to 300°C and is equipped with programmable lift pins.
The HMDS vapor prime hot plate has a programmable temperature range up to 200°C. The process is fully automated and adheres to all recognized safety standards.