Coater Module – Rotating Covered Chuck Technology (RCCT™)

Obducat’s revolutionary Rotating Covered Chuck Technology (RCCT™) process environment design provides for:

  • A completely sealed solvent saturated atmosphere
  • Minimal turbulence around the substrate eliminating rotational corner effects on squared substrates, enabling industry leading uniformity across the entire substrate at lower spin speeds.
  • Superior coating uniformity on submicron layers as well as for thick resist layers compared to open bowl.
  • Reduced process cost and improved environmental profile by lowering material consumption.
  • Elimination of Backside Rinse (BSR).