Coater Module – Rotating Covered Chuck Technology (RCCT™)
Obducat’s revolutionary Rotating Covered Chuck Technology (RCCT™) process environment design provides for:
- A completely sealed solvent saturated atmosphere
- Minimal turbulence around the substrate eliminating rotational corner effects on squared substrates, enabling industry leading uniformity across the entire substrate at lower spin speeds.
- Superior coating uniformity on submicron layers as well as for thick resist layers compared to open bowl.
- Reduced process cost and improved environmental profile by lowering material consumption.
- Elimination of Backside Rinse (BSR).