Fully automatic module for double side coating
The tool can be equipped with an automatic wafer flip station to also enable backside processing. The module has a servo-controlled arm. It provides a full edge grip with an exclusion zone of 3mm.
![Fully automatic module for double side coating Fully automatic module for double side coating](https://www.obducat.com/wp-content/uploads/2020/09/Fully-automatic-module-for--600x400.jpg)
The tool can be equipped with an automatic wafer flip station to also enable backside processing. The module has a servo-controlled arm. It provides a full edge grip with an exclusion zone of 3mm.